• 光学器件 •

### 边缘形貌缺陷对条状光学天线响应特性的影响

1. 中国海洋大学 信息科学与工程学院, 山东 青岛 266100
• 收稿日期:2018-10-23 出版日期:2019-04-25 发布日期:2019-01-24
• 通讯作者: 元光(1967-),男,教授,博导,主要研究方向为纳米材料与人工微结构的光电特性、红外光谱检测技术.Email:yuanguang@ouc.edu.cn
• 作者简介:张骞(1993-),男,硕士研究生,主要研究方向为光学天线的红外增强特性.Email:zhangqian_ouc@qq.com
• 基金资助:

国家自然科学基金（No.41476082），电波环境特性及模化技术重点实验室资助（No.201803001）

### Influence of Edge Morphology Defect on Response Characteristics of Strip Optical Antenna

ZHANG Qian, LI Chun, YUAN Guang

1. College of Information Science and Engineering, Ocean University China, Qingdao, Shandong 266100, China
• Received:2018-10-23 Online:2019-04-25 Published:2019-01-24
• Contact: 2019-01-24
• Supported by:

The National Natural Science Foundation of China, (No. 41476082), Key Laboratory of Radio Wave Environment Characteristics and Modeling Technology(No.201803001)

Abstract:

The finite-time difference method is used to simulate the influence of the concave and convex defects on the edge of the antenna on the response characteristics and electric field distribution of the strip antenna on the silicon substrate.The calculation results show that both types of defects change the electric field direction and electric field strength near the defect.The convex defect can enhance the electric field in the vicinity,while the concave defect is opposite,and the closer to the end of the antenna,the stronger the effect of defects.Defects of different positions and sizes have different effects on the area of the electric field enhancement.When the concave-defect is located at the end of the antenna,as the size increases,the area where the electric field strength is increased by 2 times monotonously decreases,and the area where the electric field is enhanced by 4 times monotonously increases.When the defect is 20 nm,the area where the electric field strength is increased by 2 times is reduced by about 3%,and the area where the electric field is enhanced by 4 times is increased by about 4%.Different from the concave defect,the convex defect has no simple monotonicity,and the defect position is different,and the influence is also different.However,controlling defects within 10 nm can significantly reduce the impact.This result provides a theoretical basis for the accuracy requirements of optical antenna processing.