光子学报 ›› 2019, Vol. 48 ›› Issue (6): 630001-0630001.doi: 10.3788/gzxb20194806.0630001

• 光谱学 • 上一篇    下一篇

基于表面图像锐度的LIBS自动对焦方法

王华东1,2, 付洪波1, 贾军伟1,2, 周琪琪1,2, 倪志波1, 董凤忠1,2   

  1. 1. 中国科学院安徽光学精密机械研究所 光子器件与材料安徽省重点实验室, 合肥 230031;
    2. 中国科学技术大学, 合肥 230026
  • 收稿日期:2019-01-15 出版日期:2019-06-25 发布日期:2019-03-14
  • 通讯作者: 董凤忠(1965-2019),男,研究员,博士生导师,主要研究方向为新型光纤传感、高灵敏光谱探测以及有毒有害气体快速在线监测等.Email:fzdong@aiofm.ac.cn
  • 作者简介:王华东(1990-),男,博士研究生,主要研究方向为激光诱导击穿光谱及应用.Email:whdm818@163.com
  • 基金资助:

    国家自然科学基金(No.61505223)

LIBS Autofocus Method Based on Acutance of Surface Image

WANG Hua-dong1,2, FU Hong-bo1, JIA Jun-wei1,2, ZHOU Qi-qi1,2, NI Zhi-bo1, DONG Feng-zhong1,2   

  1. 1. Anhui Provincial Key Laboratory of Photonics Devices and Materials, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031;
    2. University of Science and Technology of China, Hefei 230026
  • Received:2019-01-15 Online:2019-06-25 Published:2019-03-14
  • Supported by:

    The National Natural Science Foundation of China (No. 61505223)

摘要:

利用自行设计的集成微区成像激光诱导击穿光谱系统,分析了孔径光阑设定、目标区域大小以及样品表面反射率对表面图像位置敏感特性的影响.结果表明,表面图像锐度在大孔径设定下对位置更为敏感,适用于自动对焦过程;反射率对表面图像锐度的位置敏感特性影响较小,且部分表面图像的锐度也可用于辅助激光诱导击穿光谱对焦;不同样品不同目标区域大小,图像锐度最大值对应表面位置具有很好的重复性.在此基础上,建立了基于表面图像锐度的自动对焦方法.

关键词: 激光诱导击穿光谱, 图像处理, 非接触测量, 光谱学, 自动对焦

Abstract:

By using a homemade laser induced breakdown spectroscopy system integrated with a micro-imager, the influence of aperture, region of interest, reflectivity of sample on position sensitivity of image acutance was analyzed. The results show that image acutance is more sensitive to the position under larger aperture, larger aperture is more suitable for the autofocus process. The reflectivity of sample has a little influence on the position sensitivity of image acutance, and the acutance of the partial image can also be used to assist the laser induced breakdown spectroscopy focus. The surface position corresponding to the maximum acutance has good repeatability for different samples and different region of interest. On this basis, an autofocus method based on the acutance of the surface image was established.

Key words: Laser induced breakdown spectroscopy, Image processing, Non-contact measurements, Autofocus, Spectroscopy

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