光子学报 ›› 2020, Vol. 49 ›› Issue (10): 1022001-1022001.doi: 10.3788/gzxb20204910.1022001

• 光学设计与制造 • 上一篇    下一篇

用于皮秒激光切割的贝塞尔镜头研究

魏张帆1,2(), 孙川1, 郭凯1, 陈明1, 黄立华1,2, 曾爱军1,2(), 黄惠杰1,2   

  1. 1.中国科学院上海光学精密机械研究所 信息光学与光电技术实验室,上海 201800
    2.中国科学院大学 材料与光电研究中心,北京 100049
  • 收稿日期:2020-06-24 接受日期:2020-07-27 出版日期:2020-10-25 发布日期:2020-10-13
  • 作者简介:魏张帆(1985—),男,博士研究生,主要研究方向为精密光电测控技术. Email: wzf@siom.ac.cn|曾爱军(1975—),男,研究员,博士,主要研究方向为偏振光技术及其应用、精密光电检测技术及仪器. Email: aijunzeng@siom.ac.cn
  • 基金资助:
    国家自然科学基金(61805264);政府间科技创新国际合作计划(2016YFE0110600);上海市扬帆计划(18YF1426500);上海市自然科学基金(19ZR1464300)

Study on Bessel Lens for Picosecond Laser Cutting

Zhang-fan WEI1,2(), Chuan SUN1, Kai GUO1, Ming CHEN1, Li-hua HUANG1,2, Ai-jun ZENG1,2(), Hui-jie HUANG1,2   

  1. 1.Laboratory of Information Optics and Optoelectronic Technology,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China
    2.Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
  • Received:2020-06-24 Accepted:2020-07-27 Online:2020-10-25 Published:2020-10-13
  • Supported by:
    National Natural Science Foundation of China(61805264);Intergovernmental International Cooperation Program in Science and Technology Innovation(2016YFE0110600);Shanghai Sailing Program(18YF1426500);Natural Science Foundation of Shanghai(19ZR1464300)

摘要:

设计并研制了一套用于激光切割的贝塞尔镜头及光束检测系统.此外,采用设计的贝塞尔镜头与中心波长为1 064 nm的皮秒脉冲激光器产生皮秒贝塞尔光束,对厚度为1 mm的硅酸盐玻璃进行了切割实验.结果表明,一定直径的高斯光束入射到此贝塞尔镜头上,产生的贝塞尔光束中心主瓣直径和无衍射传输距离分别达到3.4 μm和2.46 mm;切割实验中,玻璃分离前的表面微孔直径不超过设计的贝塞尔光束中心主瓣直径.本文设计的贝塞尔镜头及光束检测系统能够满足激光切割应用要求.

关键词: 激光光学, 贝塞尔光束, 激光材料加工, 玻璃切割, 光束检测

Abstract:

A Bessel lens for laser cutting and beam measurement system are designed and developed. Additionally, picosecond Bessel beam is generated by a picosecond pulse laser and the designed Bessel lens, and it is used for the cutting experiment on a piece of silicate glass with the thickness of 1 mm. The results show that, by the incidence of a Gaussian beam with certain diameter on the Bessel lens, the central core diameter and non-diffracting propagation distance of the generated Bessel beam are 3.4 μm and 2.46 mm, respectively. In the cutting experiment, the diameters of the surface micro-holes before glass breaking are smaller than the designed central core diameter of Bessel beam. The designed Bessel lens and beam measurement system in this paper can satisfy the application requirements of laser cutting.

Key words: Laser optics, Bessel beam, Laser materials processing, Glass dicing, Beam measurement

中图分类号: