光子学报 ›› 2020, Vol. 49 ›› Issue (10): 1031001-1031001.doi: 10.3788/gzxb20204910.1031001

• 薄膜 • 上一篇    下一篇

Zr基薄膜金属玻璃的制备及其光学常数测定

吴曼玉(), 黄水平()   

  1. 宁波大学 物理科学与技术学院,浙江 宁波 315211
  • 收稿日期:2020-04-17 接受日期:2020-07-22 出版日期:2020-10-25 发布日期:2020-10-13
  • 通讯作者: 黄水平 E-mail:wumanyu0103@163.com;huangshuiping@nbu.edu.cn
  • 作者简介:吴曼玉(1992-),女,硕士研究生,主要研究方向为薄膜光学. Email: wumanyu0103@163.com|黄水平(1965-),男,副教授,博士,主要研究方向为薄膜光学和光电检测技术. Email: huangshuiping@nbu.edu.cn
  • 基金资助:
    国家自然科学基金(61675104)

Preparation of Zr-based Thin Film Metallic Glass and Determination of Its Optical Constant

Man-yu WU(), Shui-ping HUANG()   

  1. School of Physical Science and Technology,Ningbo University,Ningbo,Zhejiang 315211,China
  • Received:2020-04-17 Accepted:2020-07-22 Online:2020-10-25 Published:2020-10-13
  • Contact: Shui-ping HUANG E-mail:wumanyu0103@163.com;huangshuiping@nbu.edu.cn
  • Supported by:
    National Natural Science Foundation of China(61675104)

摘要:

为获得薄膜金属玻璃在可见-近红外波段的光学常数,采用真空磁控溅射技术在Si基底上制备Zr基(ZrCuNiAl(64.13∶15.75∶10.12∶10%at))薄膜金属玻璃.使用椭圆偏振光谱仪测量了样品在三个不同入射角的椭偏参数,并用Drude-Lorentz双振子模型对测出的椭偏参数进行拟合,得到薄膜在可见-近红外波段的光学常数与膜厚.用掠入射X射线反射法进一步测量样品的膜厚以验证椭圆偏振光谱仪测量结果的可靠性.结果表明,两种方法测出的样品膜厚一致,Drude-Lorentz双振子模型很好地描述了Zr基薄膜金属玻璃样品在可见-近红外波段的光学特性.在可见-近红外波段,样品在同一波长的椭偏参数ΨΔ随入射角增大而减小,介电常数实部为负值且随波长增大而减小,介电常数虚部为正值且随波长增大而增大;样品折射率明显小于消光系数,且折射率在1 070 nm处出现极大值,消光系数则在1 070 nm附近出现拐点,表明金属玻璃兼具一般金属和玻璃的光学性能.本文研究结果对Zr基及其它薄膜金属玻璃光学特性的研究和测量具有一定指导作用.

关键词: Zr基金属玻璃, 薄膜, 光学常数, 可见-近红外波段, 椭圆偏振法, Drude-Lorentz双振子模型, 磁控溅射

Abstract:

The aim of this paper is to obtain the optical constants of the thin film metallic glass in the visible and near-infrared region. Zr-based (ZrCuNiAl(64.13∶15.75∶10.12∶10%at)) thin film metallic glass was prepared on Si substrate using vacuum magnetron sputtering technology at first, then the ellipsometric parameters of the sample at three different angles of incidence were measured by spectroscopic ellipsometry. The optical constants and thickness of the film in the visible and near-infrared region were obtained by fitting the measured ellipsometric parameters using the Drude-Lorentz two-oscillator model. Moreover, the thickness of the sample was also measured by grazing incidence X-ray reflection to verify the reliability of the measurement results of the ellipsometer. The results show that the thicknesses of the sample measured by the two methods are consistent. The Drude-Lorentz two-oscillator model can describe the optical properties of the Zr-based thin film metallic glass in the visible and near-infrared region well. In the visible and near-infrared region, both of Ψ and Δ decrease with increasing incident angle; the real parts of the dielectric constants are negative and decrease with increasing wavelength; the imaginary parts of the dielectric constants are positive and increase with increasing wavelength. The refractive index of the sample is obviously smaller than the extinction coefficient. The refractive index has its maximum at 1 070 nm, and the extinction coefficient has an inflection point around 1 070 nm. It follows that thin film metallic glass has the optical properties of both general metal and glass. The investigatedresults of this paper will be helpful for the investigation and measurement of the optical properties of Zr-based and the other kinds of thin film metallic glass.

Key words: Zr-based metallic glass, Thin films, Optical constants, Visible and near-infrared region, Ellipsometry, Drude-lorentz two-oscillator model, Magnetron sputtering

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