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Acta Photonica Sinica  2017, Vol. 46 Issue (8): 0816003    DOI: 10.3788/gzxb20174608.0816003
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Thermal Stability of Mid-infrared SiO2 Thin Films Deposited by Dual Ion Beam Sputtering Method
SHANG Peng1,2, JI Yi-qin1, ZHAO Dao-ling3, XIONG Sheng-ming4, LIU Hua-song1, LI Ling-hui4, TIAN Dong4
1. Tianjin Key Laboratory of Optical Thin Film, Tianjin Jin Hang Institute Technical Physics, Tianjin 300192, China;
2. State Key Labs of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China;
3. Shandong Institute of Metrology, Jinan 250014, China;
4. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

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